Cannes-Mandelieu, 5-7 May 2003 PARALLEL-BEAMS/LEVER ELECTROTHERMAL OUT-OF-PLANE ACTUATOR
نویسندگان
چکیده
We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and measurements are consistent if the temperature dependence of the properties of the polycrystalline Si is taken into account.
منابع مشابه
Parallel-beamslever Electrothermal Out-of-plane Actuator
We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combiniig numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and ...
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